Description of the RI

New generation of aberration corrected electron microscope, the open laboratory of the Hungarian Materials Science. Sub-nanometer resolution in TEM imaging providing atomic arrangement and analytical (EDS) information on a few nanometer scale with the four EDS detectors built into the column. Elemental maps can be taken by EDS. Heating holder (with precise MEMS chip) and study of reactions inside the microscope. Helping the university teaching and partner in industrial development.

Activities and Services

Research of thin films exploring the growth mechanism and properties. Materials science analysis using transmission electron microscopy (TEM). Sample preparation, atomic resolution images with a resolution below 0.1 nm in TEM mode thanks to the spherical aberration corrector built in. Several detectors in Scanning Transmission Electron Microscopy mode for example giving images in which the contrast is proportional with the (square) atomic number. Preparation of elemental maps taken by EDS detector based on characteristic X-Ray lines. Plan view and Cross sectional specimens, depth profiling. Determination of phases, failure analysis. Investigation of semiconductors, metals, insulators and alloys.